Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum
نویسندگان
چکیده
Microscopy and diffraction measurements are presented of ultrathin binary alloy films ruthenium molybdenum that obtained by standard sputter deposition . For compositions close to Ru 50 Mo , we find the be amorphous. The amorphicity is accompanied a significant reduction roughness with respect equally thick either or molybdenum. We ascribe this absence grain structure characteristic polycrystalline separate elements. • Amorphous, thin can produced simultaneous deposition. Surfaces amorphous RuMo extremely smooth. Grain boundaries make regular, rougher than their mixture.
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ژورنال
عنوان ژورنال: Surface & Coatings Technology
سال: 2022
ISSN: ['1879-3347', '0257-8972']
DOI: https://doi.org/10.1016/j.surfcoat.2022.128729